Patent Assignment
Reel/Frame 027986/0540
Assignment of Assignor's Interest
Recorded: 2012-04-04
Pages: 2
Assignor
MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
Executed: 2012-02-28
Assignee
KLA-TENCOR MIE GMBH
KUBACHER WEG 4, WEILBURG, 35781, GERMANY
Covered Property
(1)
Apparatus for Measuring Feature Widths on Masks for the Semiconductor Industry
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Correction to Our Error
Aug 18, 2005
From: HILLMANN, FRANK; VOLLRATH, WOLFGANG; SCHEURING, GERD; BRUECK, HANS-JUERGEN
To: LEICA MICROSYSTEMS SEMICONDUCTOR GMBH; MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
Reel/Frame 016647/0193 →
Change of Name
Apr 4, 2012
From: VISTEC SEMICONDUCTOR SYSTEMS GMBH
To: KLA-TENCOR MIE GMBH
Reel/Frame 027987/0603 →
Change of Name
Apr 4, 2012
From: LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
To: VISTEC SEMICONDUCTOR SYSTEMS GMBH
Reel/Frame 027987/0636 →