Patent Assignment
Reel/Frame 016873/0496
Assignment of Assignor's Interest
Recorded: 2005-10-11
Pages: 7
Assignors
WALDFRIED, CARLO
Executed: 2005-10-07
HAN, QINGYUAN
Executed: 2005-10-05
ESCORCIA, ORLANDO
Executed: 2005-10-06
BERRY, IVAN, III
Executed: 2005-09-07
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Ultraviolet Assisted Porogen Removal and/or Curing Processes for Forming Porous Low K Dielectrics
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →