Patent Assignment
Reel/Frame 017359/0766
Assignment of Assignor's Interest
Recorded: 2005-12-21
Pages: 3
Assignor
FREER, BRIAN S.
Executed: 2005-12-20
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Ion Beam Angle Measurement Systems and Methods Employing Varied Angle Slot Arrays for Ion Implantation Systems
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →