IP Library Assignment 018710/0858
Patent Assignment
Reel/Frame 018710/0858

Assignment of Assignor's Interest

Recorded: 2006-12-19 Pages: 3
Assignors
TAO, TENG CHAO D.
Executed: 2006-12-12
LEE, WILLIAM D.
Executed: 2006-12-13
LAFONTAINE, MARVIN R.
Executed: 2006-12-19
PUROHIT, ASHWIN M.
Executed: 2006-12-13
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Annulus Clamping and Backside Gas Cooled Electrostatic Chuck
Patent: 8,422,193 →
Application: 11/641,334 →
Publication: US 2008/0144251
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →