Patent Assignment
Reel/Frame 022473/0020
Assignment of Assignor's Interest
Recorded: 2009-03-31
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Properties
(11)
Method of Treating a Semi-Conductor Wafer
Patent:
5,874,367 →
Application:
08/362,429 →
Method of Treating a Semi-Conductor Wafer
Patent:
5,858,880 →
Application:
08/578,660 →
Method of Treating a Semiconductor Wafer in a Chamber Using Hydrogen Peroxide and Silicon Containing Gas or Vapor
Patent:
6,287,989 →
Application:
09/174,578 →
Methods and Apparatus for Treating a Semiconductor Substrate
Patent:
6,242,366 →
Application:
09/251,157 →
Method of Treating an Isulating Layer
Patent:
6,592,770 →
Application:
09/554,290 →
Deposition of a Siloxane Containing Polymer
Patent:
6,475,564 →
Application:
09/582,859 →
Method for treating silicon containing polymer layers with plasma or electromagnetic radiation
Patent:
6,544,858 →
Application:
09/601,086 →
Delivery of Liquid Precursors to Semiconductor Processing Reactors
Patent:
6,640,840 →
Application:
09/667,329 →
Dielectric Layer for a Semiconductor Device and Method of Producing the Same
Method of Treating an Insulating Layer
Dielectric Layer for a Semiconductor Device and Method of Producing the Same
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Ucc Financing Statement Amendment-Collateral Change, Deleting Certain Collateral from the Financing Statement
Feb 27, 2009
From: UNITED COMMERCIAL BANK, 5201 GREAT AMERICAN PARKWAY #300, SANTA CLARA, CA 95054-1140
To: AVIZA TECHNOLOGY, INC.; AVIZA, INC.
Reel/Frame 022320/0401 →
Release of Security Interest in Patents
Mar 3, 2009
From: UNITED COMMERCIAL BANK, 5201 GREAT AMERICAN PARKWAY #300, SANTA CLARA, CA 95054-1140
To: AVIZA TECHNOLOGY, INC.
Reel/Frame 022331/0470 →
Release of Security Interest in Patents
Mar 3, 2009
From: UNITED COMMERCIAL BANK, 5201 GREAT AMERICAN PARKWAY #300, SANTA CLARA, CA 95054-1140
To: AVIZA, INC.
Reel/Frame 022331/0484 →