Patent Assignment
Reel/Frame 022775/0676
Assignment of Assignor's Interest
Recorded: 2009-06-03
Pages: 5
Assignors
RYDING, GEOFFREY
Executed: 2009-06-02
SMICK, THEODORE
Executed: 2009-06-02
FARLEY, MARVIN
Executed: 2009-05-29
SAKASE, TAKAO
Executed: 2009-05-29
VANDERBERG, BO
Executed: 2009-05-28
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Post-Decel Magnetic Energy Filter for Ion Implantation Systems
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →