Patent Assignment
Reel/Frame 051320/0051
Assignment of Assignor's Interest
Recorded: 2019-12-18
Pages: 8
Assignors
DIAO, LI
Executed: 2014-11-20
GILBERT, DAVID
Executed: 2014-11-14
LEE, CHAN-YUN
Executed: 2014-11-20
ELLISTON, ROBERT GEORGE
Executed: 2014-12-03
PARIS, JAMES
Executed: 2014-11-24
PHANVU, HAIAU
Executed: 2014-12-03
VANIAPURA, VIJAY MATTHEW
Executed: 2014-12-03
TILLERY, TOM
Executed: 2014-11-30
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 18, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 051320/0151 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →