Patent Assignment
Reel/Frame 051320/0151
Assignment of Assignor's Interest
Recorded: 2019-12-18
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD., ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
Covered Property
(1)
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 18, 2019
From: DIAO, LI; GILBERT, DAVID; LEE, CHAN-YUN; ELLISTON, ROBERT GEORGE
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 051320/0051 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →