IP Library Granted Patent US 6,495,963
Granted Patent Utility PCT National Stage
US 6,495,963 · Confirmation No. 9460

INDUCTIVE COIL ASSEMBLY HAVING MULTIPLE COIL SEGMENTS FOR PLASMA PROCESSING APPARATUS

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2016-07-05 OATH Oath or Declaration filed 21 View
2001-03-29 LET. Miscellaneous Incoming Letter 38 View
2001-03-29 LET. Miscellaneous Incoming Letter 38 View
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Quick Facts
Patent No.
US 6,495,963
App. No.
09/673,081
Filed
2001-03-29
Granted
2002-12-17
Art Unit
2821
PTA
0 days