Patent Assignment
Reel/Frame 034855/0893
Assignment of Assignor's Interest
Recorded: 2015-01-30
Pages: 18
Assignor
AVIZA EUROPE LIMITED
Executed: 2009-10-16
Assignee
SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
C/O SURFACE TECHNOLOGY SYSTEMS PLC, IMPERIAL PARK, NEWPORT WALES, NP10 8UJ, GREAT BRITAIN
Covered Properties
(14)
Electrostatic Chucks
Patent:
6,256,186 →
Application:
09/150,669 →
Apparatus and Methods for Sputtering
Patent:
6,179,974 →
Application:
09/414,717 →
Sputtering Apparatus
Method and Depositing a Layer
Deposition Apparatus
Patent:
6,533,868 →
Application:
09/568,987 →
Inductive Coil Assembly Having Multiple Coil Segments for Plasma Processing Apparatus
Patent:
6,495,963 →
Application:
09/673,081 →
Method of Forming a Barrier Layer
Patent:
6,402,907 →
Application:
09/704,714 →
Method of Cooling an Induction Coil
Electrostatic Clamping
Methods of Forming Nitride Films
Method of Forming a Patterned Metal Layer
Plasma Processing Apparatus
Deposition Methods and Apparatus
Depositing a Tantalum Film
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Change of Name
Feb 3, 2015
From: SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
To: SPTS TECHNOLOGIES LIMITED
Reel/Frame 034876/0395 →
Security Interest
Apr 2, 2015
From: SPTS TECHNOLOGIES LIMITED
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 035364/0295 →
Release of Security Interest
Jul 5, 2016
From: JPMORGAN CHASE BANK, N.A.
To: SPTS TECHNOLOGIES LIMITED
Reel/Frame 039257/0026 →