Granted Patent
Utility
US 6,544,889
· Confirmation No. 3630
METHOD FOR TUNGSTEN CHEMICAL VAPOR DEPOSITION ON A SEMICONDUCTOR SUBSTRATE
Inventors
Hans Vercammen
Kruibeke(Bazel), BELGIUM
Joris Baele
Belsele, BELGIUM
Attorneys & Agents of Record
Classification
USPC
438/680
C23C16/14
H10P14/43
H10P14/418
Prosecution
- Examiner
- MEEKS, TIMOTHY HOWARD
- Art Unit
- 1762
- Docket No.
- Q62686
- Confirmation No.
- 3630
Foreign Priority
00403705.7
·
2000-12-28
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020086110A1
- Pub. Date
- 2002-07-04
Patent Term Adjustment
-201days
No related applications found.
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 038620, FRAME 0087
Recorded 2023-06-22
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT PATENT NUMBER 5859768 AND TO RECITE COLLATERAL AGENT ROLE OF RECEIVING PARTY IN THE SECURITY INTEREST PREVIOUSLY RECORDED ON REEL 038620 FRAME 0087. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST.
Recorded 2016-08-25
SECURITY INTEREST
Recorded 2016-04-15
RELEASE OF SECURITY INTEREST
Recorded 2016-04-05
BILL OF SALE
Recorded 2009-09-25
SECURITY INTEREST
Recorded 2005-06-01
SECURITY INTEREST
Recorded 2003-10-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-12-17
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Quick Facts
- Patent No.
- US 6,544,889
- App. No.
- 09/768,151
- Filed
- 2001-01-24
- Granted
- 2003-04-08
- Pub. No.
- US20020086110A1
- Examiner
- MEEKS, TIMOTHY HOWARD
- Art Unit
- 1762
- PTA
- -201 days
External Links