IP Library › Granted Patent US 6,589,713
Granted Patent Utility
US 6,589,713 · Confirmation No. 9508

PROCESS FOR REDUCING THE PITCH OF CONTACT HOLES, VIAS, AND TRENCH STRUCTURES IN INTEGRATED CIRCUITS

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2011-01-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-14 PA.. Power of Attorney 1 View
2011-01-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2011-01-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-01-29 TRNA Transmittal of New Application 4 View
2001-01-29 SPEC Specification 13 View
2001-01-29 CLM Claims 4 View
2001-01-29 ABST Abstract 1 View
2001-01-29 DRW Drawings-only black and white line drawings 5 View
2001-01-29 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,589,713
App. No.
09/771,820
Filed
2001-01-29
Granted
2003-07-08
Art Unit
1756
PTA
-91 days