Granted Patent
Utility
US 6,479,396
· Confirmation No. 4279
DRY POLYMER AND OXIDE VEIL REMOVAL FOR POST ETCH CLEANING
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-06 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-08-06 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-08-06 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2001-02-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-28 | SPEC |
Specification | 15 | View | |
| 2001-02-28 | CLM |
Claims | 4 | View | |
| 2001-02-28 | ABST |
Abstract | 1 | View | |
| 2001-02-28 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-02-28 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/723
H10P70/234
H10P50/287
H10W20/031
H10W20/081
H10P50/283
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Docket No.
- 01P7503 US
- Confirmation No.
- 4279
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-02-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-13
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Quick Facts
- Patent No.
- US 6,479,396
- App. No.
- 09/794,055
- Filed
- 2001-02-28
- Granted
- 2002-11-12
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- 0 days
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