Granted Patent
Utility
US 6,349,240
· Confirmation No. 5619
Semiconductor device manufacturing system and method of manufacturing semiconductor devices
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-23 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-23 | SPEC |
Specification | 70 | View | |
| 2001-03-23 | CLM |
Claims | 8 | View | |
| 2001-03-23 | ABST |
Abstract | 1 | View | |
| 2001-03-23 | DRW |
Drawings-only black and white line drawings | 23 | View | |
| 2001-03-23 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Sumio Ogawa
Higashihiroshima-shi, JAPAN
Minoru Ueki
Higashihiroshima-shi, JAPAN
Shinichi Hara
Shimonoseki-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
700/121
H10P74/23
H10P95/00
Prosecution
- Examiner
- RAO, SHEELA S
- Art Unit
- 2121
- Docket No.
- 088941/0191
- Confirmation No.
- 5619
Foreign Priority
P2000-087480
·
2000-03-27
·
JAPAN
Publication
- Pub. No.
- US20010026949A1
- Pub. Date
- 2001-10-04
Patent Term Adjustment
-102days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-08-21
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-11-26
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-06
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-23
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Quick Facts
- Patent No.
- US 6,349,240
- App. No.
- 09/814,871
- Filed
- 2001-03-23
- Granted
- 2002-02-19
- Pub. No.
- US20010026949A1
- Examiner
- RAO, SHEELA S
- Art Unit
- 2121
- PTA
- -102 days
External Links