Granted Patent
Utility
US 6,519,760
· Confirmation No. 4389
METHOD AND APPARATUS FOR MINIMIZING OPTICAL PROXIMITY EFFECTS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-06-13 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2019-06-13 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2019-06-04 | PA.. |
Power of Attorney | 1 | View | |
| 2019-06-04 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2019-06-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2001-04-24 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-24 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-04-24 | SPEC |
Specification | 26 | View | |
| 2001-04-24 | CLM |
Claims | 5 | View | |
| 2001-04-24 | ABST |
Abstract | 1 | View | |
| 2001-04-24 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-04-24 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
716/19
H10P76/00
G03F7/705
G03F7/70125
G03F7/70433
G03F7/70441
Prosecution
- Examiner
- CRANE, SARA W
- Art Unit
- 2811
- Customer No.
- 92703
- Confirmation No.
- 4389
Publication
- Pub. No.
- US20020152451A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-6days
Parent
Claims priority from a provisional application
→
App. 60/271,722
Filed 2001-02-28
· Provisional Application Expired
Child
is a Continuation in-part of
→
App. 10/083,683
· US 6,792,591
Filed 2002-02-27
· Patented Case
Child
is a Continuation in-part of
→
App. 10/938,510
· US 7,100,145
Filed 2004-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 11/503,302
· US 7,735,052
Filed 2006-08-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-28
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Quick Facts
- Patent No.
- US 6,519,760
- App. No.
- 09/840,305
- Filed
- 2001-04-24
- Granted
- 2003-02-11
- Pub. No.
- US20020152451A1
- Examiner
- CRANE, SARA W
- Art Unit
- 2811
- PTA
- -6 days
External Links