Patent Application
Provisional
App. No. 60/271,722
· Confirmation No. 4226
Method and apparatus for minimizing optical proximity effects
Provisional Application Expired
Inventors
Xuelong Shi
Santa Clara, CA
Stephen Hsu
Santa Clara, CA
Fung Chen
Santa Clara, CA
Robert J. Socha
Santa Clara, CA
Micea Dusa
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-048
- Confirmation No.
- 4226
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/271,722
- Filed
- 2001-02-28
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