Granted Patent
Utility
US 6,792,591
· Confirmation No. 1543
METHOD OF IDENTIFYING AN EXTREME INTERACTION PITCH REGION, METHODS OF DESIGNING MASK PATTERNS AND MANUFACTURING MASKS, DEVICE MANUFACTURING METHODS AND COMPUTER PROGRAMS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-05-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-05-04 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-05-04 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-04 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-04 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-02-19 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-06 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-02-06 | CLM |
Claims | 6 | View | |
| 2004-02-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-02-06 | DIST |
Terminal Disclaimer | 2 | View | |
| 2004-01-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-11-06 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-11-06 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-11-06 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-05-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-05-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-05-28 | FOR |
Foreign Reference | 2 | View | |
| 2002-05-28 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2002-03-26 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2002-02-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-27 | A.PE |
Preliminary Amendment | 3 | View | |
| 2002-02-27 | SPEC |
Specification | 25 | View | |
| 2002-02-27 | CLM |
Claims | 5 | View | |
| 2002-02-27 | ABST |
Abstract | 1 | View | |
| 2002-02-27 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2002-02-27 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-02-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-02-27 | FWCLM |
Index of Claims | 1 | View | |
| 2002-02-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-27 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2002-02-27 | SPEC |
Specification | 25 | View | |
| 2002-02-27 | CLM |
Claims | 5 | View | |
| 2002-02-27 | ABST |
Abstract | 1 | View | |
| 2002-02-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-02-27 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-02-27 | A.PE |
Preliminary Amendment | 1 | View | |
| 2002-02-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2002-02-27 | FRPR |
Certified Copy of Foreign Priority Application | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
716/19
G03F7/705
G03F7/70125
G03F7/70433
G03F7/70441
Prosecution
- Examiner
- GARBOWSKI, LEIGH M
- Art Unit
- 2825
- Customer No.
- 20277
- Docket No.
- 55071-131
- Confirmation No.
- 1543
Publication
- Pub. No.
- US20020157081A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
0days
Parent
is a Continuation in-part of
→
App. 09/840,305
· US 6,519,760
Filed 2001-04-24
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/271,722
Filed 2001-02-28
· Provisional Application Expired
Child
is a Continuation of
→
App. 10/938,510
· US 7,100,145
Filed 2004-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 11/503,302
· US 7,735,052
Filed 2006-08-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S ADDRESS, PREVIOUSLY RECORDED AT REEL 012939 FRAME 0565.
Recorded 2003-08-11
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-28
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Quick Facts
- Patent No.
- US 6,792,591
- App. No.
- 10/083,683
- Filed
- 2002-02-27
- Granted
- 2004-09-14
- Pub. No.
- US20020157081A1
- Examiner
- GARBOWSKI, LEIGH M
- Art Unit
- 2825
- PTA
- 0 days
External Links