Granted Patent
Utility
US 6,586,348
· Confirmation No. 3388
A METHOD FOR PREVENTING ETCHING-INDUCED DAMAGE TO A METAL OXIDE FILM BY PATTERNING THE FILM AFTER A NUCLEATION ANNEAL BUT WHILE STILL AMORPHOUS AND THEN THERMALLY ANNEALING TO CRYSTALLIZE
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-05-07 | SPEC |
Specification | 18 | View | |
| 2001-05-07 | CLM |
Claims | 2 | View | |
| 2001-05-07 | ABST |
Abstract | 1 | View | |
| 2001-05-07 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-05-07 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Walter Hartner
Glen Allen, VA
Gunther Schindler
Munchen, GERMANY
Frank Hintermaier
Munchen, GERMANY
Volker Weinrich
Paris, FRANCE
Attorneys & Agents of Record
Classification
USPC
438/785
H10P14/69398
H10D1/682
H10P14/6544
H10P50/267
H10P50/285
Prosecution
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2813
- Docket No.
- GR 98 P 4731 P
- Confirmation No.
- 3388
Publication
- Pub. No.
- US20010055890A1
- Pub. Date
- 2001-12-27
Patent Term Adjustment
-165days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-14
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-02-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-10
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,586,348
- App. No.
- 09/850,585
- Filed
- 2001-05-07
- Granted
- 2003-07-01
- Pub. No.
- US20010055890A1
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2813
- PTA
- -165 days
External Links