Granted Patent
Utility
US 6,521,081
· Confirmation No. 8828
DEPOSITION SHIELD FOR A PLASMA REACTOR
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-07-05 | OATH |
Oath or Declaration filed | 21 | View | |
| 2014-08-18 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2001-06-14 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-06-14 | A.PE |
Preliminary Amendment | 3 | View | |
| 2001-06-14 | SPEC |
Specification | 13 | View | |
| 2001-06-14 | CLM |
Claims | 8 | View | |
| 2001-06-14 | ABST |
Abstract | 1 | View | |
| 2001-06-14 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-06-14 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Stephen P. DeOrnellas
Santa Rosa, CA
Robert A. Ditizio
Petaluma, CA
Attorneys & Agents of Record
Classification
USPC
156/345
Prosecution
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1763
- Customer No.
- 23910
- Docket No.
- TEGL-01073US5
- Confirmation No.
- 8828
Publication
- Pub. No.
- US20010029894A1
- Pub. Date
- 2001-10-18
Patent Term Adjustment
-7days
Parent
is a Division of
→
App. 09/382,050
· US 6,360,686
Filed 1999-08-24
· Patented Case
Parent
is a Division of
→
App. 09/204,020
· US 6,006,694
Filed 1998-12-01
· Patented Case
Parent
is a Continuation in-part of
→
App. 08/985,730
Filed 1997-12-05
· Abandoned -- Failure to Respond to an Office Action
RELEASE OF SECURITY INTEREST
Recorded 2016-07-05
SECURITY INTEREST
Recorded 2015-04-02
CHANGE OF NAME
Recorded 2012-12-05
from
TEGAL CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-11-16
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Quick Facts
- Patent No.
- US 6,521,081
- App. No.
- 09/881,425
- Filed
- 2001-06-14
- Granted
- 2003-02-18
- Pub. No.
- US20010029894A1
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1763
- PTA
- -7 days
External Links