IP Library Patent Application 09904089
Patent Application Utility
App. No. 09/904,089 · Confirmation No. 1879

OXIDE/NITRIDE OR OXIDE/NITRIDE/OXIDE THICKNESS MEASUREMENT USING SCATTEROMETRY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2001-09-06 TRNA Transmittal of New Application 3 View
2001-09-06 DRW Drawings-only black and white line drawings 14 View
2001-07-12 TRNA Transmittal of New Application 4 View
2001-07-12 SPEC Specification 18 View
2001-07-12 CLM Claims 3 View
2001-07-12 ABST Abstract 1 View
2001-07-12 DRW Drawings-only black and white line drawings 14 View
2001-07-12 OATH Oath or Declaration filed 3 View
2001-07-12 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
09/904,089
Filed
2001-07-12
Granted
2003-07-08
Examiner
LE, THAO P
Art Unit
2818
PTA
-53 days