IP Library › Granted Patent US 6,531,377
Granted Patent Utility
US 6,531,377 · Confirmation No. 8539

METHOD FOR HIGH ASPECT RATIO GAP FILL USING SEQUENTIAL HDP-CVD

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 Code Description Pages PDF
2001-09-04 TRNA Transmittal of New Application 2 View
2001-09-04 DRW Drawings-only black and white line drawings 6 View
2001-07-13 TRNA Transmittal of New Application 3 View
2001-07-13 SPEC Specification 14 View
2001-07-13 CLM Claims 5 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 6 View
2001-07-13 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,531,377
App. No.
09/904,799
Filed
2001-07-13
Granted
2003-03-11
Pub. No.
US20030013271A1
Examiner
VU, DAVID
Art Unit
2818
PTA
-4 days