Patent Application
Utility
App. No. 09/917,554
· Confirmation No. 4014
METHOD FOR FORMING A TRENCH IN A SEMICONDUCTOR SUBSTRATE
Inventor:
Markus Kirchhoff
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-31 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-30 | PA.. |
Power of Attorney | 1 | View | |
| 2003-10-30 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-30 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-07-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-07-27 | SPEC |
Specification | 8 | View | |
| 2001-07-27 | CLM |
Claims | 2 | View | |
| 2001-07-27 | ABST |
Abstract | 1 | View | |
| 2001-07-27 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-07-27 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Markus Kirchhoff
Ottendorf-Okrilla, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/409
H10P50/613
H10B12/0387
H10D1/047
H10P50/00
H10P50/283
Prosecution
- Examiner
- PHAM, LONG
- Art Unit
- 2897
- Docket No.
- P 2000,0133
- Confirmation No.
- 4014
Foreign Priority
100 36 724.0
·
2000-07-27
·
GERMANY
Publication
- Pub. No.
- US20020022338A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
-23days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-09
from
KIRCHHOFF, MARKUS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-31
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Quick Facts
- App. No.
- 09/917,554
- Filed
- 2001-07-27
- Granted
- 2004-01-06
- Pub. No.
- US20020022338A1
- Examiner
- PHAM, LONG
- Art Unit
- 2897
- PTA
- -23 days
External Links