IP Library › Patent Application 09945316
Patent Application Utility
App. No. 09/945,316 · Confirmation No. 1351

METHOD FOR CONTROLLING RADIATION BEAM INTENSITY DIRECTED TO MICROLITHOGRAPHIC SUBSTRATES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-07-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-30 RUSH Printer Query form, used by the publications branch 1 View
2004-06-30 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2004-06-30 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-30 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-05-13 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-06 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2004-04-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-04-01 CLM Claims 13 View
2004-04-01 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-04-01 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-04-01 LET. Miscellaneous Incoming Letter 2 View
2004-01-13 CTNF Non-Final Rejection 4 View
2004-01-13 1449 List of References cited by applicant and considered by examiner 2 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-17 RCEX Request for Continued Examination (RCE) 1 View
2003-10-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-17 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-10-17 RCEX Request for Continued Examination (RCE) 1 View
2003-10-12 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-08-13 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2003-07-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-28 CLM Claims 13 View
2003-07-28 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-07-28 LET. Miscellaneous Incoming Letter 2 View
2003-07-28 XT/ Extension of Time 1 View
2003-07-25 EXIN Examiner Interview Summary Record (PTOL - 413) 7 View
2003-04-15 CTNF Non-Final Rejection 6 View
2003-04-15 892 List of references cited by examiner 1 View
2003-04-15 1449 List of References cited by applicant and considered by examiner 3 View
2003-03-24 ELC. Response to Election / Restriction Filed 1 View
2003-03-24 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-03-13 CTRS Requirement for Restriction/Election 4 View
2002-11-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-04-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-04-03 FOR Foreign Reference 1 View
2002-02-11 LET. Miscellaneous Incoming Letter 4 View
2002-02-11 OATH Oath or Declaration filed 2 View
2002-02-11 PA.. Power of Attorney 6 View
2002-02-11 XT/ Extension of Time 1 View
2002-01-25 A.PE Preliminary Amendment 1 View
2002-01-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2001-10-16 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-08-30 TRNA Transmittal of New Application 1 View
2001-08-30 SPEC Specification 16 View
2001-08-30 CLM Claims 21 View
2001-08-30 ABST Abstract 1 View
2001-08-30 DRW Drawings-only black and white line drawings 6 View
2001-08-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-08-30 SRFW Search information including classification, databases and other search related notes 1 View
2001-08-30 FWCLM Index of Claims 1 View
2001-08-30 TRNA Transmittal of New Application 1 View
2001-08-30 DRW Drawings-only black and white line drawings 7 View
2001-08-30 SPEC Specification 17 View
2001-08-30 CLM Claims 22 View
2001-08-30 ABST Abstract 1 View
2001-08-30 WFEE Fee Worksheet (SB06) 1 View
2001-08-30 WCLM Claims Worksheet (PTO-2022) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/945,316
Filed
2001-08-30
Granted
2004-09-21
Pub. No.
US20030044701A1
Art Unit
1756
PTA
-68 days