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App. No. 09/967,176 · Confirmation No. 5941

METHOD FOR OVERLAY METROLOGY OF LOW CONTRAST FEATURES

Inventor: Shoaib Hasan Zaidi
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-02-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-19 LET. Miscellaneous Incoming Letter 2 View
2004-02-19 DRW Drawings-only black and white line drawings 3 View
2003-11-28 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-28 NOA Notice of Allowance and Fees Due (PTOL-85) 8 View
2003-11-28 892 List of references cited by examiner 1 View
2003-11-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-28 FWCLM Index of Claims 1 View
2003-11-28 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-28 SPEC Specification 2 View
2003-11-28 DRW Drawings-only black and white line drawings 3 View
2003-11-12 SRNT Examiner's search strategy and results 2 View
2003-11-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-11-04 SPEC Specification 11 View
2003-11-04 CLM Claims 5 View
2003-11-04 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-11-04 DRW Drawings-only black and white line drawings 3 View
2003-11-04 LET. Miscellaneous Incoming Letter 2 View
2003-11-04 SPEC Specification 16 View
2003-09-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-11 SPEC Specification 10 View
2003-09-11 ABST Abstract 1 View
2003-09-11 CLM Claims 5 View
2003-09-11 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-09-11 DRW Drawings-only black and white line drawings 3 View
2003-09-11 LET. Miscellaneous Incoming Letter 2 View
2003-09-11 SPEC Specification 23 View
2003-06-06 892 List of references cited by examiner 1 View
2003-06-06 1449 List of References cited by applicant and considered by examiner 1 View
2003-06-06 CTNF Non-Final Rejection 11 View
2003-06-02 SRNT Examiner's search strategy and results 5 View
2002-01-17 SPEC Specification 13 View
2002-01-17 CLM Claims 6 View
2002-01-17 ABST Abstract 1 View
2002-01-17 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-01-17 LET. Miscellaneous Incoming Letter 3 View
2002-01-17 TRNA Transmittal of New Application 2 View
2002-01-17 SPEC Specification 13 View
2002-01-17 CLM Claims 6 View
2002-01-17 ABST Abstract 1 View
2001-11-02 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-09-28 SPEC Specification 13 View
2001-09-28 CLM Claims 3 View
2001-09-28 ABST Abstract 1 View
2001-09-28 OATH Oath or Declaration filed 3 View
2001-09-28 WFEE Fee Worksheet (SB06) 1 View
2001-09-28 WFEE Fee Worksheet (SB06) 1 View
2001-09-28 SRFW Search information including classification, databases and other search related notes 1 View
2001-09-28 FWCLM Index of Claims 1 View
2001-09-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-28 TRNA Transmittal of New Application 3 View
2001-09-28 DRW Drawings-only black and white line drawings 3 View
2001-09-28 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-28 TRNA Transmittal of New Application 3 View
2001-09-28 SPEC Specification 13 View
2001-09-28 CLM Claims 3 View
2001-09-28 ABST Abstract 1 View
2001-09-28 DRW Drawings-only black and white line drawings 3 View
2001-09-28 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/967,176
Filed
2001-09-28
Granted
2004-04-20
Pub. No.
US20030063278A1
Art Unit
2877
PTA
-67 days