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App. No. 10/021,756 · Confirmation No. 2253

METHOD AND APPARATUS FOR MEASURING A REQUIRED FEATURE OF A LAYER DURING A POLISHING PROCESS

Inventor: Karl Mautz
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-08-25 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-08-25 LET. Miscellaneous Incoming Letter 2 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-06-03 1449 List of References cited by applicant and considered by examiner 1 View
2004-06-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-28 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2004-03-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-03-11 CLM Claims 4 View
2004-03-11 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-12-22 CTNF Non-Final Rejection 5 View
2003-12-22 892 List of references cited by examiner 1 View
2003-12-22 FWCLM Index of Claims 1 View
2003-12-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-22 SRNT Examiner's search strategy and results 1 View
2003-05-13 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-05-13 FOR Foreign Reference 38 View
2001-12-13 TRNA Transmittal of New Application 2 View
2001-12-13 SPEC Specification 12 View
2001-12-13 CLM Claims 4 View
2001-12-13 ABST Abstract 1 View
2001-12-13 DRW Drawings-only black and white line drawings 2 View
2001-12-13 OATH Oath or Declaration filed 2 View
2001-12-13 WFEE Fee Worksheet (SB06) 1 View
2001-12-13 WFEE Fee Worksheet (SB06) 1 View
2001-12-13 WCLM Claims Worksheet (PTO-2022) 1 View
2001-12-13 XT/ Extension of Time 2 View
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Quick Facts
App. No.
10/021,756
Filed
2001-12-13
Granted
2004-10-05
Pub. No.
US20030112451A1
Art Unit
2877
PTA
-90 days