Granted Patent
Utility
US 6,628,409
· Confirmation No. 1411
METHOD FOR DETERMINING THE DISTANCE BETWEEN PERIODIC STRUCTURES ON AN INTEGRATED CIRCUIT OR A PHOTOMASK
Inventor:
Christian Rotsch
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2003-07-28 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2001-11-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-21 | SPEC |
Specification | 13 | View | |
| 2001-11-21 | CLM |
Claims | 2 | View | |
| 2001-11-21 | ABST |
Abstract | 1 | View | |
| 2001-11-21 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-21 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Christian Rotsch
Munchen, GERMANY
Attorneys & Agents of Record
Classification
USPC
356/625
G03F7/705
G01N21/95623
G03F1/84
G03F7/70616
Prosecution
- Examiner
- PHAM, HOA Q
- Art Unit
- 2877
- Docket No.
- W&B-INF-907
- Confirmation No.
- 1411
Foreign Priority
100 58 216.8
·
2000-11-23
·
GERMANY
Publication
- Pub. No.
- US20020149783A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-09
from
ROTSCH, CHRISTIAN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-07-23
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Quick Facts
- Patent No.
- US 6,628,409
- App. No.
- 10/034,930
- Filed
- 2001-11-21
- Granted
- 2003-09-30
- Pub. No.
- US20020149783A1
- Examiner
- PHAM, HOA Q
- Art Unit
- 2877
- PTA
- -5 days
External Links