IP Library › Granted Patent US 6,541,387
Granted Patent Utility
US 6,541,387 · Confirmation No. 8667

PROCESS FOR IMPLEMENTATION OF A HARDMASK

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 Code Description Pages PDF
2002-01-17 TRNA Transmittal of New Application 2 View
2002-01-17 SPEC Specification 7 View
2002-01-17 CLM Claims 3 View
2002-01-17 ABST Abstract 1 View
2002-01-17 DRW Drawings-only black and white line drawings 3 View
2002-01-17 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,541,387
App. No.
10/052,201
Filed
2002-01-17
Granted
2003-04-01
Art Unit
2812
PTA
-4 days