IP Library Patent Application 10113152
Patent Application Utility
App. No. 10/113,152 · Confirmation No. 6104

METHOD OF DETECTING SHALLOW TRENCH ISOLATION CORNER THINNING BY ELECTRICAL STRESS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2007-06-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-03-11 LET. Miscellaneous Incoming Letter 1 View
2004-03-11 DRW Drawings-only black and white line drawings 12 View
2004-03-11 IFEE Issue Fee Payment (PTO-85B) 3 View
2003-12-09 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-09 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-09 892 List of references cited by examiner 1 View
2003-12-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-26 SRNT Examiner's search strategy and results 2 View
2003-11-21 WFEE Fee Worksheet (SB06) 1 View
2003-11-21 FWCLM Index of Claims 1 View
2003-10-29 ELC. Response to Election / Restriction Filed 4 View
2003-10-29 CLM Claims 3 View
2003-10-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-09-24 CTRS Requirement for Restriction/Election 5 View
2002-08-19 LET. Miscellaneous Incoming Letter 1 View
2002-08-19 DRW Drawings-only black and white line drawings 12 View
2002-03-28 TRNA Transmittal of New Application 4 View
2002-03-28 SPEC Specification 13 View
2002-03-28 CLM Claims 4 View
2002-03-28 ABST Abstract 1 View
2002-03-28 DRW Drawings-only black and white line drawings 8 View
2002-03-28 OATH Oath or Declaration filed 3 View
2002-03-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-28 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-28 FWCLM Index of Claims 1 View
2002-03-28 TRNA Transmittal of New Application 4 View
2002-03-28 DRW Drawings-only black and white line drawings 8 View
2002-03-28 SPEC Specification 13 View
2002-03-28 CLM Claims 4 View
2002-03-28 ABST Abstract 1 View
2002-03-28 OATH Oath or Declaration filed 3 View
2002-03-28 WFEE Fee Worksheet (SB06) 1 View
2002-03-28 WFEE Fee Worksheet (SB06) 1 View
2002-03-28 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
10/113,152
Filed
2002-03-28
Granted
2004-05-11
Art Unit
2829
PTA
-62 days