IP Library › Granted Patent US 6,622,738
Granted Patent Utility
US 6,622,738 · Confirmation No. 8512

APPARATUS AND SYSTEM FOR REMOVING PHOTORESIST THROUGH THE USE OF HOT DEIONIZED WATER BATH, WATER VAPOR AND OZONE GAS

Inventor: Tim Scovell
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2003-07-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-06-05 TRNA Transmittal of New Application 3 View
2002-06-05 DRW Drawings-only black and white line drawings 4 View
2002-04-24 TRNA Transmittal of New Application 2 View
2002-04-24 ADS Application Data Sheet 2 View
2002-04-24 A.PE Preliminary Amendment 29 View
2002-04-24 SPEC Specification 11 View
2002-04-24 CLM Claims 7 View
2002-04-24 ABST Abstract 1 View
2002-04-24 DRW Drawings-only black and white line drawings 4 View
2002-04-24 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,622,738
App. No.
10/131,371
Filed
2002-04-24
Granted
2003-09-23
Pub. No.
US20020134409A1
Art Unit
1746
PTA
-50 days