IP Library Granted Patent US 6,726,528
Granted Patent Utility Small
US 6,726,528 · Confirmation No. 6927

POLISHING PAD WITH OPTICAL SENSOR

Inventor: Greg Barbour
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Code Description Pages PDF
2004-03-12 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-05-14 TRNA Transmittal of New Application 1 View
2002-05-14 SPEC Specification 11 View
2002-05-14 CLM Claims 3 View
2002-05-14 ABST Abstract 1 View
2002-05-14 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
Patent No.
US 6,726,528
App. No.
10/146,494
Filed
2002-05-14
Granted
2004-04-27
Pub. No.
US20030216107A1
Art Unit
3723
PTA
-33 days