Granted Patent
Utility
US 6,540,838
· Confirmation No. 3870
APPARATUS AND CONCEPT FOR MINIMIZING PARASITIC CHEMICAL VAPOR DEPOSITION DURING ATOMIC LAYER DEPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-05-14 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2018-05-14 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2018-05-04 | PA.. |
Power of Attorney | 1 | View | |
| 2018-05-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-05-04 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2006-10-02 | C.AD |
Change of Address | 1 | View | |
| 2006-10-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2002-06-28 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-28 | SPEC |
Specification | 21 | View | |
| 2002-06-28 | CLM |
Claims | 1 | View | |
| 2002-06-28 | ABST |
Abstract | 1 | View | |
| 2002-06-28 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2002-06-28 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Ofer Sneh
Mountain View, CA
Carl J. Galewski
Aromas, CA
Attorneys & Agents of Record
Classification
USPC
118/715
C23C16/45544
H10P14/43
H10P14/6336
H10P14/69391
H10P14/6339
C23C8/00
C23C16/44
C23C16/4401
C23C16/452
C23C16/4554
Prosecution
- Examiner
- EVERHART, CARIDAD
- Art Unit
- 2825
- Customer No.
- 20995
- Confirmation No.
- 3870
Publication
- Pub. No.
- US20020162506A1
- Pub. Date
- 2002-11-07
Patent Term Adjustment
0days
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Quick Facts
- Patent No.
- US 6,540,838
- App. No.
- 10/186,071
- Filed
- 2002-06-28
- Granted
- 2003-04-01
- Pub. No.
- US20020162506A1
- Examiner
- EVERHART, CARIDAD
- Art Unit
- 2825
- PTA
- 0 days
External Links