Patent Application
Utility
App. No. 10/186,139
· Confirmation No. 5134
AMPLIFICATION OF RESIST STRUCTURES OF FLUORINATED RESIST POLYMERS BY STRUCTURAL GROWTH OF THE STRUCTURES BY TARGETED CHEMICAL BONDING OF FLUORINATED OLIGOMERS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-12-20 | C.AD |
Change of Address | 1 | View | |
| 2004-07-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-07-27 | FOR |
Foreign Reference | 70 | View | |
| 2004-07-27 | FOR |
Foreign Reference | 6 | View | |
| 2004-05-27 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-23 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-23 | FOR |
Foreign Reference | 13 | View | |
| 2004-02-23 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-23 | FOR |
Foreign Reference | 13 | View | |
| 2004-02-23 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-02-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-23 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-17 | SRNT |
Examiner's search strategy and results | 21 | View | |
| 2004-01-30 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-01-05 | A.PE |
Preliminary Amendment | 3 | View | |
| 2004-01-05 | SPEC |
Specification | 6 | View | |
| 2004-01-05 | CLM |
Claims | 4 | View | |
| 2004-01-05 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-12-31 | SRNT |
Examiner's search strategy and results | 11 | View | |
| 2003-12-17 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2002-12-16 | FRPR |
Certified Copy of Foreign Priority Application | 22 | View | |
| 2002-12-16 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2002-12-16 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-08-09 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2002-06-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-06-28 | SPEC |
Specification | 21 | View | |
| 2002-06-28 | CLM |
Claims | 4 | View | |
| 2002-06-28 | ABST |
Abstract | 1 | View | |
| 2002-06-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-06-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-06-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-06-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-06-28 | FOR |
Foreign Reference | 22 | View |
Inventors
Jorg Rottstegge
Erlangen, GERMANY
Christian Eschbaumer
Schwaig, GERMANY
Christoph Hohle
Bubenreuth, GERMANY
Waltraud Herbst
Uttenreuth, GERMANY
Michael Sebald
Weisendorf, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/322
G03F7/40
G03F7/0046
G03F7/0392
Y10S430/126
Prosecution
- Examiner
- BARRECA, NICOLE M
- Art Unit
- 1756
- Customer No.
- 24131
- Docket No.
- MUH-12236
- Confirmation No.
- 5134
Foreign Priority
101 31 144.3
·
2001-06-28
·
GERMANY
Publication
- Pub. No.
- US20030073043A1
- Pub. Date
- 2003-04-17
Patent Term Adjustment
-62days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-27
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Quick Facts
- App. No.
- 10/186,139
- Filed
- 2002-06-28
- Granted
- 2004-07-06
- Pub. No.
- US20030073043A1
- Examiner
- BARRECA, NICOLE M
- Art Unit
- 1756
- PTA
- -62 days
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