Patent Assignment
Reel/Frame 015373/0153
Assignment of Assignor's Interest
Recorded: 2004-05-27
Pages: 3
Assignors
ROTTSTEGE, JORG
Executed: 2002-11-13
ESCHBAUMER, CHRISTIAN
Executed: 2002-11-15
HOHLE, CHRISTOPH
Executed: 2002-11-12
HERBST, WALTRAUD
Executed: 2002-11-12
SEBALD, MICHAEL
Executed: 2002-11-13
Assignee
INFINEON TECHNOLOGIES AG
ST. -MARTIN-STRASSE 53, MUENCHEN, 81669, GERMANY
Covered Property
(1)
Amplification of Resist Structures of Fluorinated Resist Polymers by Structural Growth of the Structures by Targeted Chemical Bonding of Fluorinated Oligomers
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 13, 2010
From: INFINEON TECHNOLOGIES AG
To: QIMONDA AG
Reel/Frame 023773/0457 →
Assignment of Assignor's Interest
May 8, 2015
From: QIMONDA AG
To: INFINEON TECHNOLOGIES AG
Reel/Frame 035623/0001 →
Assignment of Assignor's Interest
Sep 30, 2015
From: INFINEON TECHNOLOGIES AG
To: POLARIS INNOVATIONS LIMITED
Reel/Frame 036723/0021 →