Granted Patent
Utility
US 6,750,949
· Confirmation No. 9166
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-04-15 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-09-30 | PETDEC |
Petition Decision | 1 | View | |
| 2005-06-07 | COCIN |
Request for Certificate of Correction | 2 | View | |
| 2005-04-07 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-12-10 | PET.OP |
Petition for review by the Office of Petitions | 3 | View | |
| 2004-12-10 | OATH |
Oath or Declaration filed | 14 | View | |
| 2004-12-10 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-12-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2004-11-22 | FOR |
Foreign Reference | 7 | View | |
| 2004-11-22 | FOR |
Foreign Reference | 8 | View | |
| 2004-11-22 | FOR |
Foreign Reference | 9 | View | |
| 2004-11-22 | FOR |
Foreign Reference | 5 | View | |
| 2004-11-22 | FOR |
Foreign Reference | 40 | View | |
| 2004-10-27 | COCX |
Supervisory Patent Examiner Response - Return for Certificate of Correction | 2 | View | |
| 2004-07-22 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-04-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2004-04-15 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-03-18 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2004-02-19 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-02-10 | FOR |
Foreign Reference | 16 | View | |
| 2004-02-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-11-14 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-11-14 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2003-11-14 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-11-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-10-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-10-14 | FWCLM |
Index of Claims | 1 | View | |
| 2003-09-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-09-24 | CLM |
Claims | 6 | View | |
| 2003-09-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-05-19 | CTNF |
Non-Final Rejection | 8 | View | |
| 2003-05-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-11-15 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2002-11-15 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-11-15 | FRPR |
Certified Copy of Foreign Priority Application | 22 | View | |
| 2002-08-16 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-07-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-07-12 | SPEC |
Specification | 15 | View | |
| 2002-07-12 | CLM |
Claims | 4 | View | |
| 2002-07-12 | ABST |
Abstract | 1 | View | |
| 2002-07-12 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-07-12 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-07-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-07-12 | FWCLM |
Index of Claims | 1 | View | |
| 2002-07-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-07-12 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-07-12 | SPEC |
Specification | 15 | View | |
| 2002-07-12 | CLM |
Claims | 4 | View | |
| 2002-07-12 | ABST |
Abstract | 1 | View | |
| 2002-07-12 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-07-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-12 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Erik Roelof Loopstra
Heeze, NETHERLANDS
Dominicus Jacobus Petrus Adrianus Franken
Veldhoven, NETHERLANDS
Josephus Jacobus Smits
Geldrop, NETHERLANDS
Antonius Johannes Josephus Van Dijsseldonk
Hapert, NETHERLANDS
Johannes Hubertus Josephina Moors
Helmond, NETHERLANDS
Albrecht Hof
Aalen, GERMANY
Gunter Maul
Aalen, GERMANY
Michael Muhlbeyer
Aalen, GERMANY
Klaus Mehlkopp
Alsdorf, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/53
G03F7/70258
G02B7/008
G02B7/02
G03F7/70833
Prosecution
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 292926/P-0319.010-US
- Confirmation No.
- 9166
Foreign Priority
DE 101 34 387.6
·
2001-07-14
·
GERMANY
Publication
- Pub. No.
- US20030058422A1
- Pub. Date
- 2003-03-27
Patent Term Adjustment
-151days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-15
from
SMITS, JOSEPHUS JACOBUS,
VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS,
FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS,
LOOPSTRA, ERIK ROELOF,
MOORS, JOHANNES HUBERTUS JOSEPHINA
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-15
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Quick Facts
- Patent No.
- US 6,750,949
- App. No.
- 10/193,688
- Filed
- 2002-07-12
- Granted
- 2004-06-15
- Pub. No.
- US20030058422A1
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- PTA
- -151 days
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