Patent Assignment
Reel/Frame 014708/0130
Assignment of Assignor's Interest
Recorded: 2003-10-31
Pages: 10
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2003-06-18
Assignee
CARL ZEISS SMT AG
CARL ZEISS-STRASSE 2, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Nov 15, 2002
From: LOOPSTRA, ERIK ROELOF; FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS; SMITS, JOSEPHUS JACOBUS; VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS
To: AMSL NETHERLANDS B.V.
Reel/Frame 013507/0636 →
Assignment of Assignor's Interest
Nov 15, 2002
From: HOF, ALBRECHT; MUHLBEYER, MICHAEL; MAUL, GUNTER; MEHLKOPP, KLAUS
To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLGIES AG
Reel/Frame 013508/0222 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →