Patent Assignment
Reel/Frame 013508/0222
Assignment of Assignor's Interest
Recorded: 2002-11-15
Pages: 3
Assignors
HOF, ALBRECHT
Executed: 2002-09-23
MUHLBEYER, MICHAEL
Executed: 2002-10-01
MAUL, GUNTER
Executed: 2002-09-18
MEHLKOPP, KLAUS
Executed: 2002-09-19
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLGIES AG
CARL ZEISS-STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Nov 15, 2002
From: LOOPSTRA, ERIK ROELOF; FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS; SMITS, JOSEPHUS JACOBUS; VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS
To: AMSL NETHERLANDS B.V.
Reel/Frame 013507/0636 →
Assignment of Assignor's Interest
Oct 31, 2003
From: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
To: CARL ZEISS SMT AG
Reel/Frame 014708/0130 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →