Patent Assignment
Reel/Frame 013507/0636
Assignment of Assignor's Interest
Recorded: 2002-11-15
Pages: 2
Assignors
LOOPSTRA, ERIK ROELOF
Executed: 2002-11-04
FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS
Executed: 2002-11-04
SMITS, JOSEPHUS JACOBUS
Executed: 2002-10-14
VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS
Executed: 2002-10-14
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2002-11-04
Assignee
AMSL NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Nov 15, 2002
From: HOF, ALBRECHT; MUHLBEYER, MICHAEL; MAUL, GUNTER; MEHLKOPP, KLAUS
To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLGIES AG
Reel/Frame 013508/0222 →
Assignment of Assignor's Interest
Oct 31, 2003
From: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
To: CARL ZEISS SMT AG
Reel/Frame 014708/0130 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →