IP Library Granted Patent US 6,853,209
Granted Patent B1
US 6,853,209 · App. 10/197,133 · Granted Feb 8, 2005

Contactor assembly for testing electrical circuits

Assignee: Aehr Test Systems
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Quick Facts
Patent No.
US 6,853,209
App. No.
10/197,133
Granted
Feb 8, 2005
Kind
B1
Abstract

The invention provides a contactor assembly. The contactor assembly comprises an electrical contactor including a contactor substrate, a plurality of electrical terminals on the contactor substrate; an interposer including an electrically conductive interposer substrate having first and second sides, a plurality of first and second resilient interconnection elements extending respectively from the first and second sides of the interposer substrate, wherein the interposer is positioned in a predetermined position relative to the electrical contactor in which predetermined position each first resilient interconnection element makes electrical contact with an electrical terminal of the electrical contactor, the interposer substrate having been moved relatively towards the contactor substrate to resiliently deform the first resilient interconnection elements; and a retaining component having a first portion secured to the electrical contactor and a second portion in contact with the interposer to retain the interposer in the predetermined position relative to the electrical contactor.

Claims (22)

1. A contactor assembly for use in testing electrical circuits, the contactor assembly comprising:

an electrical contactor including a contactor substrate and a plurality of electrical terminals on the contactor substrate;

an interposer including an interposer substrate having first and second sides, a plurality of first terminals on the first side, a plurality of second terminals on the second side, a plurality of first and second resilient interconnection elements extending respectively from the first and second side terminals of the interposer substrate, wherein the interposer is positioned in a predetermined position relative to the electrical contactor in which predetermined position each first resilient interconnection element makes electrical contact with an electrical terminal of the electrical contactor, the interposer substrate having been moved relatively towards the contactor substrate to differentially compress the first resilient interconnection elements in relation to the second resilient interconnection elements; and

an alignment-locking component having a first portion secured to the electrical contactor and a second portion in contact with the interposer to align the interposer in a predetermined position relative to the electrical contactor and lock by countering a force generated by the first resilient interconnection elements.

2. The contactor assembly of claim 1 , wherein the retaining component comprises a ring having an annular recess within which the interposer is seated, and a flange-like face secured to the electrical contactor.

3. The contactor assembly of claim 1 , wherein the first and second resilient interconnection elements comprise springs.

4. The contactor assembly of claim 1 , wherein the predetermined position corresponds to a position in which fiducial markings on each of the contactor substrate and interposer substrate are aligned.

5. The contractor assembly of claim 1 , wherein the first and second resilient interconnection elements comprise springs.

6. The contractor assembly of claim 1 , wherein the second resilient interconnection elements are not compressed.

7. A test probe assembly for testing electrical circuits, the test probe assembly comprising:

a frame structure having a first member;

a contactor assembly secured on the first member, the contactor assembly comprising:

an electrical contactor including a contactor substrate, and a plurality of electrical terminals on the contactor substrate;

an interposer including an electrically conductive interposer substrate having first and second sides, a plurality of first and second resilient interconnection elements extending respectively from the first and second side terminals of the interposer substrate, wherein the interposer is positioned in a predetermined position relative to the electrical contactor, in which a predetermined position of each differentially compressed resilient interconnection element, the first, compressed, making electrical contact with an electrical terminal of the electrical contactor, and wherein the second, not as compressed as the first, resilient interconnection element making electrical contact; and

an alignment-locking component having a first portion secured to the electrical contactor and a second portion secured to the interposer to align the interposer in a predetermined position relative to the electrical contactor and lock by countering a force generated by the first resilient interconnection elements.

8. The test probe assembly of claim 7 , wherein the frame structure further comprises a second member, the first and second members defining a space therebetween when in a closed position.

9. The test probe assembly of claim 8 , further comprising a wafer holder secured to the second member to hold a wafer, the first and second members being moveable relative to each other to resiliently deform the second resilient interconnection elements to bring them into contact with electrical terminals on the wafer.

10. The test probe assembly of claim 7 , wherein at least one of the contactor substrate and the interposer substrate comprises stops to limit a spacing between the contactor substrate and the interposer substrate.

11. The test probe assembly of claim 7 , wherein the interposer substrate comprises stops to limit spacing the interposer substrate and the wafer.

12. The test probe assembly of claim 7 , wherein the retaining component comprises a ring having an annular recess within which the interposer is seated and a flange-like face secured to the electrical contactor.

13. The test probe assembly of claim 7 , wherein the predetermined position corresponds a position in which fiducial markings on each of the contractor substrate and interposer substrate are aligned.

14. The test probe assembly of claim 7 , wherein the second resilient interconnection elements are not compressed.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 5, 2019
From: QVT FUND LP; QUINTESSENCE FUND L.P.
To: AEHR TEST SYSTEMS
Reel/Frame 050928/0695 →
SECURITY INTEREST Recorded Apr 14, 2015
From: AEHR TEST SYSTEMS
To: QVT FUND LP; QUINTESSENCE FUND L.P.
Reel/Frame 035424/0783 →
RELEASE OF SECURITY INTEREST Recorded Apr 13, 2015
From: SILICON VALLEY BANK
To: AEHR TEST SYSTEMS
Reel/Frame 035420/0390 →
SECURITY AGREEMENT Recorded Sep 6, 2013
From: AEHR TEST SYSTEMS
To: SILICON VALLEY BANK
Reel/Frame 031171/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2002
From: JOVANOVIC, JOVAN; UHER, FRANK O.; RICHMOND, DONALD P., II
To: AEHR TEST SYSTEMS
Reel/Frame 013290/0524 →