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App. No. 10/219,292 · Confirmation No. 5678

DEFECT INSPECTING DEVICE FOR SUBSTRATE TO BE PROCESSED AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-02-09 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-02-09 OATH Oath or Declaration filed 1 View
2003-11-14 CTNF Non-Final Rejection 6 View
2003-11-14 1449 List of References cited by applicant and considered by examiner 1 View
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2003-11-14 FWCLM Index of Claims 1 View
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2003-10-21 SRNT Examiner's search strategy and results 1 View
2002-08-16 TRNA Transmittal of New Application 3 View
2002-08-16 SPEC Specification 20 View
2002-08-16 CLM Claims 3 View
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Quick Facts
App. No.
10/219,292
Filed
2002-08-16
Granted
2004-07-27
Pub. No.
US20030053046A1
Art Unit
2877
PTA
0 days