Granted Patent
Utility
US 6,749,974
· Confirmation No. 1895
DISPOSABLE HARD MASK FOR PHOTOMASK PLASMA ETCHING
Inventor:
David Y. Chan
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-05-04 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2004-02-05 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-05 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-02-05 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-05 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-12-16 | CLM |
Claims | 5 | View | |
| 2003-12-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-09-25 | CTNF |
Non-Final Rejection | 10 | View | |
| 2003-09-25 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-09-25 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2003-02-20 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-02-20 | CLM |
Claims | 4 | View | |
| 2003-02-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-02-20 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2002-09-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-09-03 | A.PE |
Preliminary Amendment | 19 | View | |
| 2002-09-03 | SPEC |
Specification | 9 | View | |
| 2002-09-03 | CLM |
Claims | 9 | View | |
| 2002-09-03 | ABST |
Abstract | 1 | View | |
| 2002-09-03 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-09-03 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-09-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-09-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-09-03 | FWCLM |
Index of Claims | 1 | View | |
| 2002-09-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-09-03 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-09-03 | SPEC |
Specification | 9 | View | |
| 2002-09-03 | CLM |
Claims | 9 | View | |
| 2002-09-03 | ABST |
Abstract | 1 | View | |
| 2002-09-03 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-09-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-09-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-09-03 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-09-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-09-03 | A.PE |
Preliminary Amendment | 1 | View | |
| 2002-09-03 | SPEC |
Specification | 2 | View | |
| 2002-09-03 | CLM |
Claims | 10 | View | |
| 2002-09-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View |
Inventors
David Y. Chan
Austin, TX
Classification
USPC
430/5
G03F1/76
G03F1/80
G03F7/094
Prosecution
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- Docket No.
- 67493/43
- Confirmation No.
- 1895
Publication
- Pub. No.
- US20030013023A1
- Pub. Date
- 2003-01-16
Patent Term Adjustment
0days
from
PHOTRONICS, INC.
SECURITY INTEREST
Recorded 2018-09-28
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2010-02-13
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-19
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-15
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Quick Facts
- Patent No.
- US 6,749,974
- App. No.
- 10/234,790
- Filed
- 2002-09-03
- Granted
- 2004-06-15
- Pub. No.
- US20030013023A1
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- PTA
- 0 days
External Links