Granted Patent
Utility
US 6,807,454
· Confirmation No. 6765
METHOD FOR AUTOMATICALLY CONTROLLING DEFECT -SPECIFICATION IN A SEMICONDUCTOR MANUFACTURING PROCESS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-06-29 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2003-03-17 | TRNA |
Transmittal of New Application | 8 | View | |
| 2003-03-17 | ADS |
Application Data Sheet | 2 | View | |
| 2003-03-17 | SPEC |
Specification | 8 | View | |
| 2003-03-17 | CLM |
Claims | 2 | View | |
| 2003-03-17 | ABST |
Abstract | 2 | View | |
| 2003-03-17 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Sheng-Jen Wang
Hsin-Chu City, TAIWAN
Long-Hui Lin
Hsin-Chu City, TAIWAN
Attorneys & Agents of Record
Classification
USPC
700/121
H10P72/0616
Y02P90/02
G05B19/41875
G05B2219/32189
G05B2219/32207
G05B2219/32222
Prosecution
- Examiner
- JARRETT, RYAN A
- Art Unit
- 2125
- Customer No.
- 27765
- Docket No.
- LKSP0015USA
- Confirmation No.
- 6765
Foreign Priority
091109606
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2002-05-08
·
TAIWAN
Publication
- Pub. No.
- US20030212469A1
- Pub. Date
- 2003-11-13
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-09-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-04-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-07-12
CHANGE OF NAME
Recorded 2019-06-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-17
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Quick Facts
- Patent No.
- US 6,807,454
- App. No.
- 10/249,103
- Filed
- 2003-03-17
- Granted
- 2004-10-19
- Pub. No.
- US20030212469A1
- Examiner
- JARRETT, RYAN A
- Art Unit
- 2125
- PTA
- 0 days
External Links