Methods of inspecting a lithography template
View Patent ↗A method for forming imprint lithography templates is described herein. The method includes forming a masking layer and a conductive layer on a substrate surface. The use of a conductive layer allows patterning of the masking layer using electron beam pattern generators. The substrate is etched using the patterned masking layer to produce a template.
1. A method of inspecting a lithography template from a substrate having first and second opposed sides and formed from a first material, said method comprising:
forming, on said first opposed side, a second material;
patterning said second material, defining a patterned layer having a plurality of gaps therein, exposing portions of the substrate, with adjacent gaps being separated by islands of said second material, with said islands having a thickness associated therewith; and
producing inspection radiation having information concerning said islands and said portions by impinging incident radiation upon said substrate, said islands having a first response to said incident radiation and said portions have a second response to said incident radiation, differing from said first response, with said incident radiation having a wavelength associated therewith, with said thickness and said wavelength selected to enhance differentiation between information in said inspection radiation concerning said islands from information contained in said inspection radiation concerning said portions, said thickness being approximately ½ of said wavelength of said radiation.
2. The method as recited in claim 1 wherein said inspection radiation is incident radiation propagating through said portions.
3. The method as recited in claim 1 wherein said inspection radiation is incident radiation reflected from said patterned layer.
4. The method as recited in claim 1 wherein said layer is a conductive polysilicon layer and producing inspection radiation further includes producing reflected radiation by impinging an electron beam upon said substrate.
5. The method as recited in claim 1 wherein producing inspection radiation further includes producing inspector radiation by impinging light upon said substrate.
6. The method as recited in claim 1 wherein producing incident radiation further includes providing said incident radiation to impinge upon said first side of said substrate.
7. The method as recited in claim 1 wherein producing incident radiation further includes providing said incident radiation further to impinge upon said second side of said substrate.
8. The method as recited in claim 1 wherein said substrate is formed from glass and said radiation comprises ultraviolet radiation.
9. A method of inspecting a lithography template from a substrate having first and second opposed sides and formed from material, said method comprising:
forming, on said first opposed side, a polysilicon layer upon a substrate, said polysilicon layer having a thickness associated therewith;
patterning said polysilicon layer, defining a patterned polysilicon layer having a plurality of gaps therein, exposing portions of the substrate, with adjacent gaps being separated by islands of polysilicon material; and
producing reflected radiation containing information concerning said islands and said portions by impinging said incident radiation upon said substrate, said islands having a first response to said incident radiation and said portions have a second response to said incident radiation, differing from said first response, with said incident radiation having a wavelength associated therewith, with said thickness and said wavelength selected to enhance contrast between said islands of polysilicon material and said portions of said substrate, said thickness being approximately ½ of said wavelength of said radiation.
10. The method an recited in claim 9 wherein said polysilicon layer is a conductive polysilicon layer and producing reflected radiation further includes producing reflected radiation by impinging an electron beam upon said patterned polysilicon layer.
11. The method as recited in claim 9 wherein producing reflected radiation further includes producing reflected radiation by impinging light upon said patterned polysilicon layer.
12. The method as recited in claim 9 wherein producing reflected radiation further includes providing said incident radiation to impinge upon said first side of said substrate.
13. The method as recited in claim 9 wherein producing reflected radiation further includes providing said incident radiation to impinge upon said second side of said substrate.
14. The method as recited in claim 9 wherein said substrate is formed from glass and said radiation comprises ultraviolet radiation.
15. A method of inspecting a lithography template from a substrate having first and second opposed sides and formed from material transmissive of incident radiation, said method comprising:
forming, on said first opposed side, a conductive polysilicon layer upon a substrate, said polysilicon layer having a thickness associated therewith;
patterning said conductive polysilicon layer, defining a patterned polysilicon layer having a plurality of gaps therein, exposing portions of the substrate, with adjacent gaps being separated by islands of conductive polysilicon material; and
producing reflected radiation containing information concerning said islands and said portions by impinging said incident radiation upon said substrate, said islands having a first response to said incident radiation and said potions have a second response to said incident radiation, differing from said first response, with said incident radiation having a wavelength associated therewith, with said thickness and said wavelength selected to enhance contrast between said islands of conductive polysilicon material and said portions of said substrate, said thickness being approximately ½ of said wavelength of said radiation.
16. The method as recited in claim 15 wherein producing said reflected radiation further includes providing said incident radiation to impinge upon said first side of said patterned polysilicon layer.
17. The method as recited in claim 15 wherein producing reflected radiation further includes providing said incident radiation to impinge upon said second side of said patterned polysilicon layer.
18. The method as recited in claim 15 wherein producing reflected radiation further includes producing said reflected radiation by impinging an electron beam upon said patterned polysilicon layer.
19. The method as recited in claim 15 wherein producing reflected radiation further includes producing said reflected radiation by impinging light upon said patterned polysilicon layer.