Power switching transistor with low drain to gate capacitance
View Patent ↗A transistor ( 10 ) is formed on a semiconductor substrate ( 12 ) with a first surface ( 19 ) for forming a channel ( 40 ). A gate dielectric ( 22 ) has a first thickness overlying a first portion of the channel, and a dielectric film ( 20 ) overlies a second portion of the channel and has a second thickness greater than the first thickness. The second thickness reduces the drain to gate capacitance of the transistor, thereby improving its switching speed and frequency response.
1. A power switching device comprising:
a semiconductor substrate having a first conductivity type, wherein the semiconductor substrate forms a drain region;
a well region formed at a horizontal top surface of the semiconductor substrate to provide a substantially horizontal channel for the power switching device, wherein the well region has a first edge;
a source region of the first conductivity type formed in the well region;
a gate dielectric layer formed on the semiconductor substrate and over a portion of the well region, wherein the gate dielectric layer comprises a first thickness;
a dielectric region formed on the semiconductor substrate, wherein the dielectric region comprises a second thickness greater than the first thickness, and wherein a tapered edge of the dielectric region overlaps the first edge; and
a drain enhancement region formed in the semiconductor substrate adjacent to the dielectric region and spaced apart from the well region.
2. The power switching device of claim 1 wherein the dielectric region comprises a LOCOS dielectric region.
3. The power switching device of claim 2 wherein the LOCOS dielectric region overlies the substantially horizontal channel by a distance of about 0.3 micrometers.
4. The power switching device of claim 1 wherein the dielectric region overlaps the first edge by about 0.3 micrometers.
5. The power switching device of claim 1 wherein the well region has a first surface doping concentration adjacent the first thickness and a second surface doping concentration adjacent the second thickness, wherein the first surface doping concentration is greater than the second surface doping concentration.
6. A semiconductor device comprising
a semiconductor substrate having a first conductivity type, wherein the semiconductor substrate forms a drain region;
a well region formed at a top surface of the semiconductor substrate to provide a horizontal channel for the semiconductor device, wherein the well region has a first edge at the channel;
a source region of the first conductivity type formed in the well region;
a gate dielectric layer formed on the semiconductor substrate and over a portion of the well region, wherein the gate dielectric layer comprises a first peak thickness; and
a dielectric region having tapered edges formed on the semiconductor substrate, wherein the dielectric region comprises a second peak thickness greater than the first thickness, and wherein a tapered edge of the dielectric region overlaps the first edge at the channel thereby lowering gate to drain capacitance of the semiconductor device without substantially altering effective conduction threshold.
7. The semiconductor device of claim 6 wherein the tapered edge of the dielectric region overlies the first edge by a distance of about 0.3 micrometers.
8. The semiconductor device of claim 6 further comprising a drain enhancement region formed in the semiconductor substrate adjacent to the dielectric region and spaced apart from the well region.