IP Library Granted Patent US 6,861,856
Granted Patent B2
US 6,861,856 · App. 10/319,287 · Granted Mar 1, 2005

Guarded tub enclosure

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Quick Facts
Patent No.
US 6,861,856
App. No.
10/319,287
Granted
Mar 1, 2005
Kind
B2
Abstract

A probe station with an improved guarding structure.

Claims (47)

1. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a surface area suitable for supporting said device under test thereon;

(c) a conductive member vertically spaced above at least 50 percent of said surface area of said support; and

(d) said support maintaining a fixed relationship with respect to at least a portion of said conductive member when said support is moved laterally with respect to said platen.

2. The probe station of claim 1 wherein said conductive member is vertically spaced above at least 60 percent of said surface area of said support.

3. The probe station of claim 1 wherein said conductive member is vertically spaced above at least 70 percent of said surface area of said support.

4. The probe station of claim 1 where said conductive member defines a central aperture.

5. The probe station of claim 1 where said conductive member comprises a plurality of slidably overlapping plates.

6. The probe station of claim 1 further comprising an enclosure defining an opening at least partially surrounding said support.

7. The probe station of claim 6 wherein said conductive member encompasses at least 70 percent of said opening.

8. The probe station of claim 6 wherein said conductive member encompasses at least 80 percent of said opening.

9. The probe station of claim 6 wherein said conductive member encompasses at least 90 percent of said opening.

10. A probe station comprising:

(a) a platen suitable far supporting a probe for testing a device under test;

(b) a support having a surface area suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said support defining an opening;

(d) a conductive member encompasses at least 70 percent of said opening; and

(e) said conductive member being supported by said enclosure such that at least a portion of said conductive member moves horizontally with respect to said platten when said support is moved horizontally with respect to said platten.

11. The probe station of claim 10 wherein said conductive member encompasses at least 80 percent of said opening.

12. The probe station of claim 10 wherein said conductive member encompasses at least 90 percent of said opening.

13. The probe station of claim 10 wherein said conductive member is vertically spaced above at least 50 percent of said surface area of said support.

14. The probe station of claim 10 wherein said support maintains a fixed relationship with respect to said conductive member when said support is moved laterally with rasped to said platen.

15. The probe station of claim 10 wherein said conductive member is vertically spaced above at least 60 percent of said surface area of said support.

16. The probe station of claim 15 wherein said conductive member is vertically spaced above at least 70 percent of said surface area of said support.

17. The probe station of claim 10 where said conductive member defines an aperture.

18. The probe station of claim 10 where said conductive member comprises a plurality of slidably overlapping plates.

19. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a chuck suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said support, wherein said enclosure defines an upper opening;

(d) a conductive member supported by said enclosure that encompasses at least 70 percent of said opening;

(e) the combination of said conductive member and said chuck laterally movable with respect to said platen while at least a portion of said conductive member and said chuck, maintain a fixed relationship with respect to one another; and

(f) said conductive member defining an opening therein through which said probe extends to test said device under test.

20. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a surface area suitable for supporting said device under test thereon;

(c) a conductive member vertically spaced above at least 50 percent of said surface area of said support;

(d) said support maintaining a fixed relationship with respect to at least a portion of said conductive member when said support is moved laterally with respect to said platen; and

(e) said conductive member comprises a plurality of slidably overlapping plates.

21. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a surface area suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said support defining an opening;

(d) a conductive member encompasses at least 70 percent of said opening;

(e) said conductive member being supported by said enclosure; and

(f) said conductive member comprises a plurality of slidably overlapping plates.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST Recorded Jul 29, 2025
From: FORMFACTOR, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 072263/0272 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2021
From: FORMFACTOR BEAVERTON, INC.
To: FORMFACTOR, INC.
Reel/Frame 057393/0609 →
CHANGE OF NAME Recorded Jul 18, 2018
From: CASCADE MICROTECH, INC.
To: FORMFACTOR BEAVERTON, INC.
Reel/Frame 046573/0664 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →