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App. No. 10/348,150 · Confirmation No. 7527

METHOD FOR PRODUCING A CAVITY IN A MONOCRYSTALLINE SILICON SUBSTRATE AND A SEMICONDUCTOR COMPONENT HAVING A CAVITY IN A MONOCRYSTALLINE SILICON SUBSTRATE WITH AN EPITAXIAL COVERING LAYER

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2004-10-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-13 892 List of references cited by examiner 1 View
2004-07-13 DRW Drawings-only black and white line drawings 2 View
2004-07-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-13 FWCLM Index of Claims 1 View
2004-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-13 SRNT Examiner's search strategy and results 1 View
2004-07-06 SRNT Examiner's search strategy and results 12 View
2004-06-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-06-01 SPEC Specification 2 View
2004-06-01 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2004-06-01 DRW Drawings-only black and white line drawings 2 View
2004-03-02 CTNF Non-Final Rejection 9 View
2004-03-02 892 List of references cited by examiner 1 View
2004-03-02 1449 List of References cited by applicant and considered by examiner 1 View
2004-03-02 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-02 FWCLM Index of Claims 1 View
2004-01-15 ELC. Response to Election / Restriction Filed 1 View
2003-12-17 CTRS Requirement for Restriction/Election 5 View
2003-03-19 LET. Miscellaneous Incoming Letter 3 View
2003-03-19 OATH Oath or Declaration filed 5 View
2003-03-19 FRPR Certified Copy of Foreign Priority Application 19 View
2003-03-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-01-21 TRNA Transmittal of New Application 2 View
2003-01-21 SPEC Specification 14 View
2003-01-21 CLM Claims 4 View
2003-01-21 ABST Abstract 1 View
2003-01-21 DRW Drawings-only black and white line drawings 3 View
2003-01-21 OATH Oath or Declaration filed 3 View
2003-01-21 TRNA Transmittal of New Application 2 View
2003-01-21 SPEC Specification 14 View
2003-01-21 CLM Claims 4 View
2003-01-21 ABST Abstract 1 View
2003-01-21 DRW Drawings-only black and white line drawings 3 View
2003-01-21 OATH Oath or Declaration filed 3 View
2003-01-21 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-01-21 WFEE Fee Worksheet (SB06) 1 View
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2003-01-21 FOR Foreign Reference 32 View
2003-01-21 FOR Foreign Reference 18 View
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Quick Facts
App. No.
10/348,150
Filed
2003-01-21
Granted
2004-11-23
Pub. No.
US20030136994A1
Art Unit
2818
PTA
-5 days