Patent Assignment
Reel/Frame 015885/0897
Assignment of Assignor's Interest
Recorded: 2004-10-18
Pages: 5
Assignors
POPP, MARTIN
Executed: 2003-01-23
TEMMLER, DIETMAR
Executed: 2003-01-23
SCHUPKE, KRISTIN
Executed: 2003-02-04
SCHILLING, UWE
Executed: 2003-01-30
POMPLUN, KERSTIN
Executed: 2003-01-22
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STRASSE 53, MUENCHEN, 81669, GERMANY
Covered Property
(1)
Method for Producing a Cavity in a Monocrystalline Silicon Substrate and a Semiconductor Component Having a Cavity in a Monocrystalline Silicon Substrate with an Epitaxial Covering Layer
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 13, 2010
From: INFINEON TECHNOLOGIES AG
To: QIMONDA AG
Reel/Frame 023773/0457 →
Assignment of Assignor's Interest
May 8, 2015
From: QIMONDA AG
To: INFINEON TECHNOLOGIES AG
Reel/Frame 035623/0001 →
Assignment of Assignor's Interest
Oct 7, 2015
From: INFINEON TECHNOLOGIES AG
To: POLARIS INNOVATIONS LIMITED
Reel/Frame 036808/0284 →