Methods and apparatus for addition of electrical conductors to previously fabricated device
View Patent ↗A conductor carrier provides, separately manufactured, conductive pathways, on a wafer level, which may be coupled to a wafer of fully fabricated integrated circuits. Such conductor carriers include an insulating body having two major surfaces with conductors disposed on each of those surfaces, and conductors disposed within the insulating body so as to provide signal continuity between various conductors on each of the two surfaces. An assembly can be formed by permanently or removably attaching the conductor carrier to the wafer. Conductor carriers may include an evacuation pathway suitable for removing air, or other gases, from between the conductor and the wafer so as to create a pressure differential that urges the conductor carrier into contact with the wafer. Conductor carriers may include a groove which is suitable for receiving a sealing ring; and may include a street map which is suitable for providing guidance to a wafer sawing operation.
1. An apparatus, comprising:
an electrically insulating body having at least two major surfaces;
a first plurality of electrical contacts disposed on a first major surface of the body;
a second plurality of electrical contacts disposed on a second major surface of the body;
a plurality of electrical vias disposed in the body, between the first major surface and the second major surface so as to provide electrically conductive paths between at least a portion of the first plurality electrical contacts and a corresponding portion of the second plurality of electrical contacts; and
an evacuation pathway disposed in the electrically insulating body; and
an evacuation pathway sealing means disposed on the second major surface and coupled to the evacuation pathway;
wherein the first plurality of electrical contacts have a layout arranged to match a corresponding layout of a plurality of electrical contacts of a plurality of die on a wafer, such that when the first major surface of the electrically insulating body is disposed on the wafer, the first plurality of electrical contacts and the corresponding plurality of electrical contacts are in direct mechanical and electrical contact.
2. The apparatus of claim 1 , wherein the evacuation sealing means comprises an integral valve.
3. The apparatus of claim 1 , wherein evacuation sealing means comprises a removably attachable tape.
4. The apparatus of claim 1 , further comprising a circumferential groove disposed in the first major surface and adapted to receive a sealing ring.
5. The apparatus of claim 1 , further comprising an annular groove disposed on one major surface of the electrically insulating body, the groove adapted to receive a sealing material.
6. The apparatus of claim 5 , wherein the sealing material comprises an O-ring.
7. The apparatus of claim 6 , wherein the sealing material comprises a silicone gel.
8. The apparatus of claim 5 , wherein the apparatus is substantially circular and has a first radius; and wherein the apparatus is adapted to attach to the wafer that is substantially circular and has a second radius, the second radius larger than the first radius.
9. The apparatus of claim 1 , wherein the second plurality of electrical contacts comprise gold.
10. The apparatus of claim 1 , wherein the second plurality of electrical contacts comprise nickel plated copper.
11. The apparatus of claim 1 , wherein the second plurality of electrical contacts comprise conductive elastomer.
12. The apparatus of claim 1 , wherein the evacuation pathway sealing means is adapted for connection to a pressure differential source.
13. The apparatus of claim 1 , wherein the evacuation sealing means comprises a membrane pump.
14. The apparatus of claim 1 , wherein the electrically insulating body comprises a dielectric material, and wherein the electrically insulating body is flexible.
15. The apparatus of claim 1 , wherein the electrically insulating body is disposed on the wafer.