Granted Patent
Utility
US 6,716,720
· Confirmation No. 9758
METHOD FOR FILLING DEPRESSIONS ON A SEMICONDUCTOR WAFER
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-12-23 | C.AD |
Change of Address | 1 | View | |
| 2004-01-12 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-08 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-10-08 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2003-10-08 | 892 |
List of references cited by examiner | 2 | View | |
| 2003-10-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-10-08 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-10-08 | FWCLM |
Index of Claims | 1 | View | |
| 2003-10-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-09-29 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-04-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-04-09 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-04-09 | FRPR |
Certified Copy of Foreign Priority Application | 20 | View | |
| 2003-03-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-03-03 | SPEC |
Specification | 16 | View | |
| 2003-03-03 | CLM |
Claims | 3 | View | |
| 2003-03-03 | ABST |
Abstract | 1 | View | |
| 2003-03-03 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-03-03 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-03-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-03-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-03-03 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2003-03-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-03-03 | FOR |
Foreign Reference | 1 | View |
Inventors
Dirk Efferenn
Dresden, GERMANY
Hans-Peter Moll
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/424
H10W10/014
H10W10/00
H10W10/17
H10P95/066
H10W10/01
Prosecution
- Examiner
- FOURSON III, GEORGE R
- Art Unit
- 2823
- Customer No.
- 24131
- Docket No.
- W&B-INF-1642
- Confirmation No.
- 9758
Foreign Priority
102 09 334.2
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2002-03-02
·
GERMANY
Publication
- Pub. No.
- US20030166327A1
- Pub. Date
- 2003-09-04
Patent Term Adjustment
-4days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-02-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-01-12
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Quick Facts
- Patent No.
- US 6,716,720
- App. No.
- 10/378,244
- Filed
- 2003-03-03
- Granted
- 2004-04-06
- Pub. No.
- US20030166327A1
- Examiner
- FOURSON III, GEORGE R
- Art Unit
- 2823
- PTA
- -4 days
External Links