IP Library › Granted Patent US 6,780,708
Granted Patent Utility
US 6,780,708 · Confirmation No. 8235

METHOD OF FORMING CORE AND PERIPHERY GATES INCLUDING TWO CRITICAL MASKING STEPS TO FORM A HARD MASK IN A CORE REGION THAT INCLUDES A CRITICAL DIMENSION LESS THAN ACHIEVABLE AT A RESOLUTION LIMIT OF LITHOGRAPHY

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Quick Facts
Patent No.
US 6,780,708
App. No.
10/382,744
Filed
2003-03-05
Granted
2004-08-24
Art Unit
2823
PTA
0 days