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App. No. 10/386,880 · Confirmation No. 7703

METHOD TO FILL DEEP TRENCH STRUCTURES WITH VOID-FREE POLYSILICON OR SILICON

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
10/386,880
Filed
2003-03-12
Granted
2004-10-26
Pub. No.
US20040180510A1
Examiner
LEE, CALVIN
Art Unit
2825
PTA
0 days